一种快速的调制度测量轮廓术  

A Fast Modulation Measurement Profilometry

作　　者：窦蕴甫[1] 苏显渝[1] 陈延非[1] 

机构地区：[1]四川大学光电科学技术系,四川成都610064

出　　处：《光学学报》2009年第7期1858-1862,共5页Acta Optica Sinica

基　　金：国家自然科学基金(60838002;10876021)资助项目

摘　　要：调制度测量轮廓术是一种垂直测量的三维面形测量方法,可以测量表面有剧烈变化的复杂物体。提出了一种基于正交方向空间载频的快速调制度测量轮廓术。该方法将两个具有一定间距且正交的正弦光栅同时成像在被测物体上,并使被测物体位于两个光栅成像面之间。采用空间频域滤波将正交光栅图像分离,得到被测物体经正交光栅调制的两个调制度图像,利用其比值和高度的对应关系恢复出物体高度。该方法只需采集一幅图像,即可恢复出物体高度,具有三维信息实时采集的特点。实验结果表明,利用该方法可以快速且较为准确地恢复出物体的高度信息。Modulation measurement profilometry is a vertical 3D measurement technique, which can measure the complex objects with acute changes in their surfaces. A fast modulation measurement profilometry based on orthogonal spatial carrier is proposed. In this method, two cross-sinusoidal gratings at a certain interval are imaged on the surface of the testing object which is laid between two imaging planes of them. We can separate the images of orthogonal gratings through spatial frequency domain filtering, obtain the modulation distribution images of two cross-sinusoidal gratings, and then restore the height of the object through the map of the ratio of modulations and the height. It is convenient to obtain the height using only one captured image, so the main characteristic of this method is real-time 3D information collection. The experimental result proves that it can restore the height of the object fast and more accurately.

关 键 词：光学测量 动态测量 调制度测量轮廓术 傅里叶变换 正交光栅 

分 类 号：O438[机械工程—光学工程]