高精度气动传感器的研究  

Study on Pneumatic Sensor with High Precision

作　　者：王凤伟[1] 张辉[2] 邓善熙[2] 牛学虎[2] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,合肥市博士研究生230009 [2]合肥工业大学

出　　处：《工具技术》2009年第7期102-105,共4页Tool Engineering

摘　　要：介绍了气动测量中常用反射式和背压式气动传感器的设计与工作原理。理论分析出提高气动传感器灵敏度和测量范围的方法;通过对影响测量精度主要误差因素的分析,给出相应误差补偿的方法。所研制气动传感器的测量范围为55μm,分辨力为0.02μm,静态误差小于0.25μm,可适用于高精度高分辨力的非接触尺寸测量。This paper presents the design and working principle of reflective and back pressure pneumatic sensor. The meth- ods which can improve the sensitivity and measurement range of pneumatic sensor are obtained by means of theory. The affection factors of measurement precision are discussed, and the corresponding methods are adopted to compensate the errors. The mea- surement range of developed pneumatic sensor is about 55μm, with 0.02μm in resolution and less than 0.25μm in static error. Therefore, pneumatic measurement technology can be used in high accuracy, high resolution and non-contact dimension measurement.

关 键 词：气动测量 背压式气动传感器 误差分析 

分 类 号：TG87[金属学及工艺—公差测量技术]