Design and Fabrication of a NMR-Spectroscopy Microcoil for Nano-Liter Sample  

作　　者：LI Xiaonan ZHAO Wuyi WANG Ming SONG Tao YANG Wenhui 

机构地区：[1]Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China [2]Graduate University of Chinese Academy of Sciences, Beijing 100049, China

出　　处：《Chinese Journal of Electronics》2009年第1期183-186,共4页电子学报（英文版）

基　　金：This work is supported by the National Natural Science Foundation of China （No.60671053）. Thanks for Mr. Dong Bin who is the director of Open Laboratory of Agilent in China and thanks for Mr. Wang Li who is the director of Lithographic Process Laboratory in IE of CAS, and thanks for Mr. Ding working at Wuhan Fengfan Surface Engineering Co. Ltd.

摘　　要：A new kind of NMR receiving microcoil with planar shape is presented. It is used in detecting μV-level signal referred as the Free Induction Decay radiated from nano-liter biochemical samples having spin nuclear. It was fabricated by the photolithography and home- developed copper electroplating technology. SU-8 photoresist was used for construction of electroplating mask with high aspect ratio. Several geometries of planar microcoil fabricated are with τi 200 to 1000μm, wire width/separate 20 to 80μm and optimal number of turns 3 to 7. The Characterization of planar microcoils fabricated were performed with Agilent Impedance Analyzer 4294A and in agree with prediction by theory. The results for Microcoil 1000_1 under 85MHz is the resistance under AC of 7.25Ω, inductance of 285nH and quality value of 21.

关 键 词：Nuclear magnetic resonance spectroscopy Planar microcoil RF electrical parameter Photolithography technology 

分 类 号：TN244[电子电信—物理电子学] TH135[机械工程—机械制造及自动化]