显微物镜数字剪切波面像差评价仪  

A Digital Shearing Wavefront Interferometer for Image Quality Evaluation of Microscope Objectives

作　　者：白剑[1] 程上彝[1] 刘承 杨国光[1] 

机构地区：[1]浙江大学光学仪器国家重点实验室

出　　处：《仪器仪表学报》1998年第3期285-288,296,共5页Chinese Journal of Scientific Instrument

基　　金：机械工业部科技重点基金

摘　　要：本文介绍了所开发的显微物镜像质评价仪，它利用数字波面剪切干涉技术实现显微物镜轴上、轴外单色波像差的实时检测，提出了用有限元解析二维剪切波面的新算法并应用于该评价仪中，最后对实验所测得的数据进行了对比分析，其精度可达λ／２０。A digital shearing wavefront interferometer for image quality evaluation of microscope objectives has been developed.It is based on digital wavefront shearing interferometry and can obtain the wavefront on and off optical axe in real time.A new finite elementmethod for reconstruction of wavefront is proposed and applied to this interferometer.Finally,experiment results are obtained and comparision analysis is made,which shows its accuacy is less than λ/20.

关 键 词：剪切波面 有限元 显微镜 像质评价仪 

分 类 号：TH742[机械工程—光学工程]