基于Optiwave的脊形SiGe-OI光波导结构设计  

The Structure Design of Ridged SiGe-OI Optical Waveguide Based on Optiwave

作　　者：高勇[1] 冯松[1] 杨媛[1] 冯玉春[2] 

机构地区：[1]西安理工大学电子工程系,西安710048 [2]深圳大学光电子器件与系统重点实验室,深圳518060

出　　处：《光子学报》2009年第7期1692-1696,共5页Acta Photonica Sinica

基　　金：深圳大学省;部重点实验室开放基金资助

摘　　要：利用有效折射率的数值解法,计算出了SiGe-OI脊形光波导的有效折射率.通过对SiGe-OI光波导结构参量的理论分析和计算,得到了SiGe-OI脊形光波导传输单模光波时内外脊高H,h及脊宽W的尺寸.通过Optiwave软件对SiGe-OI脊形光波导进行建模仿真,验证了理论分析和计算的正确性.The effective refractive index of ridged SiGe-OI optical waveguide is calculated, using the numerical solution of effective refractive index. Through the theoretical analysis and calculations of SiGe-OI optical waveguide structure parameters,the ridged SiGe-OI optical waveguide structure parameters include H,h,W are obtained when the single-mode optical waveguide is transmited. The model of ridged SiGe-OI optical waveguide is built and simulated by Optiwave software, and the correctness of theoretical analysis and calculations are verified.

关 键 词：SiGe—OI脊形光波导 有效折射率 结构参量 

分 类 号：TN252[电子电信—物理电子学]