新型压电式三维力传感器的设计及特性研究  

Design and characteristics research of a new type three-dimension force sensor based on piezoelectricity

作　　者：许斌[1] 秦岚[1] 刘俊[1] 邓维礼[1] 

机构地区：[1]重庆大学光电工程学院,重庆400044

出　　处：《国外电子测量技术》2009年第7期40-44,共5页Foreign Electronic Measurement Technology

摘　　要：基于压电效应设计了一种新型三维力传感器,分析了传感器原理。根据传感器的结构,推导了传感器的灵敏度、固有频率的计算公式;分析了传感器部件参数对传感器灵敏度与固有频率的影响,通过计算与仿真,得到了影响传感器灵敏度与固有频率的影响因素与规律。计算与仿真结果表明了此计算方法的有效性。This paper provides a new type three-dimension force sensor technology based on piezoelectricity, analysis the theory of the sensor. Through the analysis of the structure, the formula to calculate the sensitivity and natural frequency of the sensor is derived finally. The effect of the parameters for the component on the sensitivity and the natural frequency of the sensor are analyzed, some influencing factors and its rule are found through calculating and simulating. The results of computation and simulation indicate the effectiveness of the calculating method.

关 键 词：压力传感器 灵敏度 固有频率 

分 类 号：TP21[自动化与计算机技术—检测技术与自动化装置]