掺锶对钛酸铅薄膜结晶性能的影响  

Effect of strontium-doped content on crystallization properties of plumbum titanate thin films

作　　者：韩亚楠[1] 翟学良[1] 吴江 申玉双[3] 

机构地区：[1]河北师范大学实验中心,河北石家庄050016 [2]柴沟堡师范学校 [3]河北化工医药职业技术学院

出　　处：《无机盐工业》2009年第8期24-26,共3页Inorganic Chemicals Industry

基　　金：河北省自然科学基金项目(B2006000136);河北省教育厅项目(Z20055350)

摘　　要：钛酸锶铅(PST)薄膜是一类重要的铁电薄膜材料。采用溶胶-凝胶法在硅(100)衬底上制备了钛酸锶铅薄膜。利用X射线衍射(XRD)、原子力显微镜(AFM)等表征手段,表征了不同锶掺杂量及不同退火温度对薄膜结晶性能的影响。通过实验发现:锶掺杂对薄膜的微观结构和表面形貌有重要的影响。由XRD谱图发现,随着锶掺入量的增加,Pb1-xSrxTiO3薄膜中的晶轴比、晶胞体积都逐渐减小,晶化温度降低。通过AFM发现,相同掺锶量的薄膜随着退火温度的升高,结晶性能增强,颗粒增大,粗糙度增加。Plumbum strontium titanate （ PST ） thin film is a kind of important ferroelectric thin film. Strontium-doped plumbum titanate was grown on Si（100） suhstrate by sol - gel method. Effect of different strontiumdoped contents and annealing temperatures on crystallization properties of the films were investigated by XRD and AFM etc.. Results showed that strontium-doped content had great effect on microstructure and morphology of the films. The c/a, unit cell volume, and crystallization temperature were all decreased with the increasing of strontium-doped content from XRD spectrogram. In addition, AFM analysis showed that as the increasing of annealing temperature,crystallization properties were promoted, and particle size and roughness of the films were increased.

关 键 词：钛酸锶铅 薄膜 溶胶-凝胶 晶胞参数 

分 类 号：TQ134.33[化学工程—无机化工]