光学读出红外成像中反光板变形对光学检测灵敏度的影响  

EFFECT OF REFLECTOR DEFORMATION ON OPTICAL DETECTION SENSITIVITY FOR OPTICAL READOUT INFRARED IMAGING SYSTEM

作　　者：高杰[1] 张青川[1] 陈大鹏[2] 焦斌斌[2] 史海涛[1] 钱剑[1] 程腾[1] 伍小平[1] 

机构地区：[1]中国科学技术大学中国科学院材料力学行为和设计重点实验室,安徽合肥230027 [2]中国科学院微电子研究所,北京100029

出　　处：《红外与毫米波学报》2009年第4期249-253,共5页Journal of Infrared and Millimeter Waves

基　　金：自然科学基金仪器专项基金(10627201);重点基金(10732080);国家重大基础研究计划(2006CB300404)资助项目

摘　　要：在刀口滤波光学读出方法的基础上,讨论了反光板弯曲的情况下,刀口滤波方法的光学检测灵敏度与反光板长度之间的关系.分析表明,在反光板曲率半径一定的情况下,光学检测灵敏度首先随着反光板长度的增加而增大,达到最大值后随着反光板长度的增加而减小.对于不同曲率半径和长度的反光板,分析给出反光板长度L和曲率半径R在满足L2/R=λ(λ为照明光波长)时,光学检测灵敏度达到最大值.实验测量了已制作的像素尺寸分别为200μm,120μm和60μmFPA的光学检测灵敏度,其实验结果和理论分析一致.Based on the optical readout method with knife edge filter, the relationship between the optical detection sensitivity and reflector length was discussed under the circumstance that the reflector was bent. Analysis indicates that the optical sensitivity increases with the reflector＇s lengthening at first, then it reaches a maximum value, and then it decreases as the reflector continues to lengthen. For the reflectors with different curvature radii and lengths, analysis shows that the sensitivity will reach a maximum value when the expression L^2/R = A （L is length of reflector, R is curvature of the reflector, A is wavelength of illumination light） is satisfied. The optical detection sensitivities of the fabricated FPAs with different pixel sizes as 200μm, 120μm and 60μm were obtained experimentally. The result coincides with the theoretical analysis.

关 键 词：非制冷红外成像 双材料微悬臂梁 光学读出 焦平面阵列 

分 类 号：TN216[电子电信—物理电子学]