溅射NiCrAl微晶涂层的氧化行为  

OXIDATION BEHAVIOR OF SPUTTERED NiCrAl MICROCRYSTALLINE COATING

作　　者：高唯[1,2] 刘振宇[1,2] 王福会[1,2] 

机构地区：[1]奥克兰大学化工与材料工程系 [2]中国科学院金属腐蚀与防护研究所金属腐蚀与防护国家重点实验室

出　　处：《腐蚀科学与防护技术》1998年第4期192-196,共5页Corrosion Science and Protection Technology

摘　　要：研究了氩气压力对溅射Ｎｉ－２０Ｃｒ－２Ａｌ涂层晶粒尺寸及其抗氧化性能的影响．结果表明，随氩气压力的降低涂层的晶粒尺寸减小，当氩气压力降至０．６７Ｐａ时，涂层晶粒直径约为６５ｎｍ，该涂层在１０００℃空气中可以形成单一的氧化铝膜，从而大大提高合金的抗氧化性能．The effect of Ar pressure on grain sizes of sputtered Ni 20Cr 2Al coating was investigated. The results indicated that the grain sizes reduced with decreasing Ar pressure. When Ar pressure was 0.67 Pa, the grain size of coating was about 65 nm and a pure continuous Al 2O 3 scale was formed on this coating as a result of grain boundary diffusion of aluminum.

关 键 词：溅射 微晶 氧化 涂层 氧化腐蚀 腐蚀 

分 类 号：TG174.44[金属学及工艺—金属表面处理]