93k集成电路测试系统校准原理及实现方法研究  

Research on Principle and Method of Calibration on 93k IC Test System

作　　者：贺志容[1] 石坚[1] 韩红星[1] 

机构地区：[1]武汉数字工程研究所,湖北武汉430074

出　　处：《宇航计测技术》2009年第3期66-69,共4页Journal of Astronautic Metrology and Measurement

摘　　要：介绍了93k集成电路测试系统校准原理与实现方法,讨论了校准过程中的量值传递关系;以HPP-MU为例,给出了量值传递的实现过程,并分析了93k校准原理与方法在确保量值准确、一致性上的优点。Describes the principle and method of calibration on 93k IC test system,and discusses the relations of dissemination of the value of a quantity. It also takes HPPMU for example to illuminate the process of dissemination of the value of a quantity, finally analyses the advantages of the presented method for calibration on 93k IC test system.

关 键 词：校准 基准 内部参考源 中间参量 系统参量 

分 类 号：TN4[电子电信—微电子学与固体电子学]