基于光机集成仿真技术的摆镜特性分析  

Characteristic analysis of tilt mirror based on optomechanical integrated simulation

作　　者：徐广州[1] 阮萍[1] 李婷[1] 李福[1] 王洪伟[1,2] 杨建峰[1] 

机构地区：[1]中国科学院西安光学精密机械研究所,西安710119 [2]中国科学院研究生院,北京100039

出　　处：《光学技术》2009年第4期532-535,540,共5页Optical Technique

摘　　要：为考察相关跟踪系统摆镜在静力和动力载荷工况下面形参数是否满足工程需求,基于光机集成仿真技术对相关跟踪摆镜特性进行了分析,得到了在静力和时间历程载荷所对应的三种工况下的面形变化分布和面形表征参数,并对仿真结果的数据可靠性进行了数值角度验证。结果表明,光机集成仿真方法可以有效地消除由动力载荷产生的主动刚体位移,可得到摆镜面形参数和在动力载荷作用下不同时刻的摆镜面型变化,弥补了在实验条件下难以测得由动力载荷作用的面形参数和面形分布情况。当1g加速度载荷在摆镜光轴方向上时,静力载荷对面形的影响起主导作用;当1g加速度载荷不在摆镜光轴方向上时,动力载荷对面形的影响起主导作用。通过光机集成仿真结果对所设计的摆镜在相应工况下的面形进行有效评估,获得了有意义的设计指导数据。To check if the related tracking system tilt mirror＇ s surface satisfies the engineering requirement in the static and dynamic load case, the characteristic of the tilt mirror is analyzed based on optomechanical integrated simulation method. The distribution of surface deformation and parameter standing for surface are gained in the static and time-history load that relate to three working conditions. The results demonstrate optomechanical interface program can eliminate the rigid displacement under the dynamic load effectively. The parameters and surface contour of tilt mirror in different time of dynamic load are gotten, but the parameters above can not be easily gained by the experimental method generally. Static load plays a dominant role to the mirror surface deformation in the case of lg acceleration in the direction of optical axis, and dynamic load makes the domination to mirror surface deformation in other direction of lg acceleration. The useful design data is provided by the effectively evaluation to the tilt mirror under the related working conditions based on optomechanical integrated simulation method.

关 键 词：集成仿真 ZERNIKE多项式 有限元法 摆镜 

分 类 号：TH74[机械工程—光学工程]