液相单片阵列QCM传感器及测量系统研究  

Monolithic QCM Sensor Array and Related Measuring System for Detecting in Liquid Phase

作　　者：梁吴迪[1] 朱惠忠[2] 王文炎[1] 

机构地区：[1]清华大学深圳研究生院,广东深圳518055 [2]深圳清华大学研究院,广东深圳518057

出　　处：《仪表技术与传感器》2009年第7期17-19,共3页Instrument Technique and Sensor

基　　金：国家科技支撑计划项目(2006BAK02A09)

摘　　要：研究一种用于液相检测的单片阵列QCM传感器及测量系统。在一个石英基片上制作多个QCM单元,封装成适于液相检测的阵列QCM器件;基于同一振荡电路,通过选通激励方式,测量阵列中的各敏感单元,消除振荡电路的差异性影响。采用嵌入式微处理器LPC2132和CPLD器件XC9572构建并行频率测量及控制系统,实现多通道QCM测量?控制?计算显示和数据通讯等功能,构成一个完整的液相QCM阵列传感器系统平台。A novel monolithic QCM sensor array device and the related measuring system were discussed. The sensor array was manufactured with 5 QCM components on a single quartz crystal plate was packaged with a liquid pole to make it available for measuring in liquid medium. Related measuring system that controlled by embedded ARM microcontroller LPC2132 was developed to stimulate the QCM devices in the array in scanning mode with a single resonating circuit in order to eliminate the error of disperse between different circuits when working with multi-channel circuits. The frequency measuring module with CPLD was designed to measure the frequencies of the QCM array in parallel with some other functions, such as display, calculating and communication. The whole works present a new solution for chemical and biology sensor technology..

关 键 词：QCM 阵列传感器 嵌入式系统 CPLD 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置]