巨磁电阻AgCo颗粒膜的制备工艺和结构  

Preparation and Structure of Giant Magneto-resistance AgCo Granular Films

作　　者：郑远开[1] 于军[1] 林更琪[1] 李佐宜[1] 

机构地区：[1]华中理工大学电子科学与技术系

出　　处：《华中理工大学学报》1998年第8期50-52,共3页Journal of Huazhong University of Science and Technology

摘　　要：　采用磁控射频溅射法制备了AgCo颗粒膜；研究了薄膜制备工艺对薄膜结构的影响．实验结果发现，在AgCo颗粒膜中，Ag和Co的分离度很好，没有形成合金或化合物；退火和提高Co含量，可以使薄膜中Co颗粒增大；随着退火温度的升高，Ag和Co的分离度提高．AgCo granular films are prepared with Inagnetron RF sputtering system. The effect ofsputtering process on the film structure is studied. In the granular coCo films,a phase of Ag and aphase of Co are separated, and atoms of Co precipitate from lattices of Ag and atoms of Ag fromlattices of Co. As the annealing temperature and the concentration of Co increase, the granular size of Coincrease. The phase separation becomes more apparent at high annealing temperature.

关 键 词：磁性薄膜 颗粒膜 巨磁电阻效应 结构 AgCo 

分 类 号：TN304.2[电子电信—物理电子学] O484.1[理学—固体物理]