薄圆片石英晶体应力分布及谐振器力频实验  

Stress Distribution of Thin Circular Quartz Crystals and Force Frequency Sensitive Experiments

作　　者：罗兵[1] 田文杰[1] 邹淑芳[2] 

机构地区：[1]北京信息科技大学传感器重点实验室,北京100101 [2]云南广播电视大学,昆明650223

出　　处：《微纳电子技术》2009年第8期489-493,共5页Micronanoelectronic Technology

基　　金：北京市自然科学基金(4082011);北京(传感器)重点实验室开放课题基金(KM200810772008);北京市教委科技创新平台基金资助项目(PXM2008_014224_067420)

摘　　要：利用ANSYS有限元理论模型分析AT切石英晶体受沿x轴方向的对径力作用时晶片内的应力分布情况,并计算三电极位置处的应力变化比值。测试了三电极谐振器的基频振荡频率,并计算其相应的力频系数。通过比较ANSYS仿真分析的结果和实验所得结果,表明ANSYS仿真分析计算结果与实验结果基本一致,从而证明ANSYS仿真分析是可行的。因此,在同一晶体基片上设计谐振器时,可借助有限元分析手段,根据晶片内的应力分布情况,在有限空间范围内初步选择应力变化差异较大的位置设置电极,以此获得力频敏感特性显著的集成式石英晶体谐振器。The stress distribution of a circular quartz crystal was analized by using ANSYS finite element method when quartz crystal was subjected to a force F along X axis. The ratios of the stresses changing in the three electrode points were calculated. The base-frequency of threeelectrode resonators was tested, and the corresponding force frequency coefficients were calculated. By comparing the results of ANSYS simulation analysis with the experiment results, it shows that they are basically identical, and proves that ANSYS simulation analysis is feasible. There- fore, according to the stress distribution in the chip, the electrode is set on the point with large stress changing in a finite space by the finite element method to obtain a integrated quartz resonator with the prominent force frequency sensitivity characteristic when a resonator is designed on the same circular quartz crystal.

关 键 词：石英晶体 ANSYS分析 谐振器 力频灵敏度系数 应力分布 

分 类 号：O765[理学—晶体学] TM229.1[一般工业技术—材料科学与工程]