小功率平面螺旋电感耦合微波等离子体源的研究  

Study on Low Power Inductively-Coupled Microwave Plasma Source Based on Planar Spiral Microstrip

作　　者：廖斌[1] 周蓓[1] 曹焕丽[1] 朱守正[1] 

机构地区：[1]华东师范大学信息学院电子系,上海200241

出　　处：《电子学报》2009年第8期1860-1864,共5页Acta Electronica Sinica

基　　金：国家自然科学基金(No.60471015)

摘　　要：本文提出一种基于平面螺旋微带的2.45GHz小功率电感耦合微波等离子体源,根据等效变压器耦合模型分析等离子体源的谐振特性,通过微波等离子体吸收功率与等离子体阻抗之间的关系,研究不同气压条件下的放电规律.研究表明,在低气压条件下,输入功率不超过220mW时,空气开始放电;而在常压条件下,输入功率不超过1.5W时,氩气开始放电;随着微波等离子体的激励,小功率微波等离子体源的谐振频率和S参数都发生变化.这为电感耦合微波等离子体源的小型化研究提供了理论基础.A low power inductively-coupled microwave plasma source based on planar spiral microstrip at 2.45GHz is presented in this paper. The resonant characteristics of the plasma source are analyzed with equivalent transformer coupled circuit model, and the discharges in various gas pressure based on the interrelation between absorbed power and plasma impedance are studied. The research shows that air plasma is ignited in low pressure as the input power is less than 220mW, and Ar plasma is ignited in atmospheric pressure as the input power is less 1.5W. The resonant frequency and S parameter of low power microwave plasma source change with excitation of microwave plasma. This may be a theoretical guidance for miniaturization of inductively-coupled microwave plasma source.

关 键 词：平面螺旋微带 小功率电感耦合微波等离子体源 谐振特性 气体放电 S参数 

分 类 号：TN99[电子电信—信号与信息处理]