基片方向对多弧离子镀ZrN涂层性能的影响  

Influence of Substrate Direction on Properties of Multi-arc Ion Plating ZrN Coatings

作　　者：田飞[1,2] 张平[1] 杜军[1] 赵军军[1] 蔡志海[1] 

机构地区：[1]装甲兵工程学院装备再制造技术国防科技重点试验室,北京100072 [2]66393部队,河北保定071000

出　　处：《装甲兵工程学院学报》2009年第4期83-86,共4页Journal of Academy of Armored Force Engineering

基　　金：军队科研计划项目

摘　　要：采用多弧离子镀在304不锈钢基体表面沉积ZrN涂层。利用X射线衍射仪、扫描电子显微镜、纳米压入仪、电化学分析仪等，比较了基片方向对涂层结构、形貌、成分、沉积速率、硬度以及耐腐蚀性的影响。结果表明：基片方向不同会引起晶体择优取向的改变；垂直于靶材的样品表面大颗粒相对较少，但沉积速率只有平行样品的40％-50％；在负偏压条件下，平行于靶材的样品涂层硬度更高，而垂直样品获得更好的耐腐蚀性。The zirconium nitride coating is deposited on the surface of 304 stainless steel substrate oriented parallel with and perpendicular to the zirconium target with multi-arc ion plating. The effect of substrate direction on structure and properties of the coating is investigated with XRD, SEM, nano-indenter and electrochemistry instrument. The experimental results shows that the preferred direction of ZrN coating changes along with the changing of substrate direction, and the number of particles on the surface of ZrN coatings prepared on parallel oriented substrates is less, while the deposition rate is only 40 to 50 percents compared with that of the coatings on vertical oriented substrates. The coatings prepared on parallel directed substrates show higher value of hardness, but the vertical ones display better property of corrosion resistance under negative bias voltage.

关 键 词：多弧离子镀 ZRN 基片方向 硬度 耐腐蚀性 

分 类 号：TG115[金属学及工艺—物理冶金]