微细电解加工用电极的侧壁绝缘及应用实验  

Side-Insulation of Tool Electrode and Application in Micro ECM

作　　者：刘改红[1] 李勇[1] 陈旭鹏[1] 马晓宇[1] 朱效谷[1] 

机构地区：[1]清华大学制造工程研究所摩擦学国家重点实验室,北京100084

出　　处：《电加工与模具》2009年第4期28-31,39,共5页Electromachining & Mould

基　　金：国家高技术研究发展计划资助项目(2006AA04Z317)

摘　　要：介绍了一种微细电解加工用电极的侧壁绝缘方法及其应用实验。采用旋涂法在电极表面涂敷液态环氧树脂并固化处理，重复该过程形成多层绝缘薄膜，用机械磨削法去除电极端部的绝缘膜，使电极端面导电。通过基础工艺实验优化了旋涂法工艺参数，通过对比实验验证了侧壁绝缘电极的微孔加工效果。旋涂法可制得膜厚为5～10 μm的侧壁绝缘电极，采用该电极加工可显著减小微孔直径及锥度，提高微细电解加工尺寸精度。This paper presented a new side-insulation approach for micro electrodes in micro ECM, in which spin-coating and room curing are used to coat the micro tool electrodes with a very thin film of polymer, followed by an end-rubbing process to remove the insulation material from the electrode end surfaces. Processing parameters of spin-coating were optimized experimentally, and side-insulated micro electrodes with a five-layer epoxy coating of 5-10um thickness were prepared. Experiments were made to test the effect of side-insulated electrode in micro hole Machining. And the results demonstrated that the side-insulated electrode used as tool electrode can significantly reduce the hole diameter and taper and improve the machining accuracy.

关 键 词：微细电解加工 微细电极 侧壁绝缘 微细孔 

分 类 号：TG662[金属学及工艺—金属切削加工及机床]