基体温度对气相沉积聚氯代对二甲苯膜结构与性能的影响  

Effect of Substrate Temperature on the Microstructure and Properties of Vapor Deposited Poly (Chloro-Para-Xylylene) Thin Films

作　　者：陈艳平[1] 帅茂兵[1] 鲜晓斌[1] 吉祥波[1] 唐贤臣[1] 

机构地区：[1]中国工程物理研究院,四川绵阳621900

出　　处：《高分子材料科学与工程》2009年第8期40-42,46,共4页Polymer Materials Science & Engineering

摘　　要：用化学气相沉积法制备的聚氯代对二甲苯膜具有优异的耐溶剂腐蚀及气体阻隔性能。文中采用X射线衍射(XRD)、扫描电镜(SEM)表征了不同基体温度下制备聚氯代对二甲苯膜的微观组织结构;采用MOCON透湿仪测试了其水汽渗透率。结果表明,随基体温度升高,膜内聚合物分子链取向度先升高、后降低,且在较高温度下聚合物苯环基团更倾向于垂直基体表面。水汽在膜内渗透速率随基体温度升高先降低、后升高,且在约30℃～45℃处达到最低值。Poly （chloro-para-xylylene） films prepared by chemical vapor deposition method exhibit excellent resistant of solvent and good barrier properties to various gases. In this paper, X-ray diffraction（XRD） and scanning electron microscope（SEM） were used to characterize the microstructure of poly（chloro-para-xylylene）（PPXC） films prepared at different substrate temperature. Moisture permeability rate was measured by MOCON moisture permeation instrument. The results show that with the increase of substrate temperature, crystallization degree of films increases initially, decreases later. The plane of the phenyl group orient more perpendicular to the plane of the substrate during vapor deposition polymerization at the upper substrate temperature. Permeation rate of vapor in films decreases initially, then increases with the increase of substrate temperature, and the minimum is obtained at 45 ℃.

关 键 词：聚氯代对二甲苯膜 基体温度 微观结构 渗透性 

分 类 号：TB383[一般工业技术—材料科学与工程]