基于ANSYS的硬质氧化铝薄膜/铝合金基体系统热屈曲变形有限元分析  

Finite Element Analysis of Thermal flection Distortion in Hard Alumina Film/Al-allay Substrate System by ANSYS

作　　者：弓满锋[1] 梅芳[1] 张燊沛[1] 

机构地区：[1]湛江师范学院物理科学与技术学院,广东湛江524048

出　　处：《湛江师范学院学报》2009年第3期57-61,共5页Journal of Zhanjiang Normal College

基　　金：湛江师范学院科研基金资助项目(L0807)

摘　　要：假设薄膜和基体界面处于理想结合状态下，且不考虑薄膜中缺陷的影响，采用有限元软件（ANSYS8．0）分析了（5～30）μm厚氧化铝薄膜／铝合金基体系统中的热屈曲变形．结果表明：矩形薄板热屈曲后的拱高值随薄膜厚度的增加而增加，弦长和曲率值则随薄膜厚度的增加而减小．对应于（5～30）μm厚度区间，拱高变化量分布在（0．0681～0．2876）mm范围内，弦长变化量分布在（0．05817～0．05536）mm范围内．氧化铝薄膜／铝合金基体系统翘曲变形的曲率值分布在（1091～4610）mm的范围内，且曲率随薄膜厚度变化的非线性特征显著．矩形薄板z方向位移Ux和z方向位移Uz均是关于y轴对称的．另外，根据Uz的变形特点可知拱顶位于x=0处，该处弯曲程度最为严重，易造成氧化铝薄膜开裂而失效．The interfaces between Al2O3 film and Al--alloy substrate are supposed to be in a perfect state, and the flaw effect in Al2O3 film is also ignored. A finite element software （ANSYS 8.0） has been adopted to analyze the thermal flections distortion of Al2O3 films with （5-30）μm thickness. The results showed that the arch height increased with increasing Al2O3 films thickness in the rectangular thin metal-- sheet, but the chord-length and the curvature decreased with increasing thickness. When the Al2O3 films thickness changed from 5μmto 30μm, the Uz maximum, corresponding to the arch--height change, distributed in the range of 0. 068 1-0. 287 6 mm, the Ux maximum, corresponding to the chord--length change, distributed in the range of 0. 058 17- 0. 055 36 mm, and the curvature changed from 1 091mm to 4 610 mm. It was noteworthy that the curvature nonlinearly changed with the films thickness. The Ux and Uz values were symmetrical about y axis. The bend extent at the x=0 was the most serious, which based on the analysis of Uz distortion characteristic, and the Al2O3 films were easy to crack at this location.

关 键 词：硬质氧化铝 铝合金 热屈曲 变形 有限元 

分 类 号：TB125[理学—工程力学]