超精密平面研磨磨盘变形的数值仿真研究  

Numerical simulation of lapping plate deformation in ultra-precision flat lapping

作　　者：陶玉志[1] 王成勇[1] 袁慧[1] 宋月贤[1] 

机构地区：[1]广东工业大学机电工程学院,广州510090

出　　处：《金刚石与磨料磨具工程》2009年第4期34-38,共5页Diamond & Abrasives Engineering

基　　金：广州市科技计划项目(2007Z3-D9021)

摘　　要：利用有限元软件仿真分析了由铸铁、锡、聚四氟乙烯等材料组合成研磨盘时,研磨盘的最大变形量与加载条件的关系。研究结果表明,研磨盘材料的弹性模量越大,其最大变形量越小;采用硬质材料作基体、将软质材料贴合在硬质材料表面一起构成研磨盘材料时,研磨盘加载后的变形量远远小于单独使用软质材料作为研磨盘材料时的变形量。作者计算出了当研磨盘尺寸为直径400mm×高40mm,材料分别为铸铁、纯锡、铸铁-纯锡、铸铁-PTFE时,要使研磨盘的最大变形量为2μm,所应施加的最大加载压力值分别为31.2kPa,13.2kPa,21.8kPa和11kPa.此值可供研磨机设计与使用时参考选用。Relationship between the maximum plate deformation and the load conditions were simulated using ANSYS10.0 software on lapping plates made of mono-material （ Fe, Sn, PTFE ） and binary materials （ Fe-Sn, Fe-PTFE）. Based on the analysis and calculation, conclusions are obtained as follows：the bigger the material＇s Young＇s modulus ,the smaller the deformation of the lapping plate ;The plate deformation is much smaller when the plate is made of hard base material and soft top material than the case when the plate is made of the same soft material; For lapping plates of d 400 mm× h 40 mm and made of Fe, Sn, Fe-Sn , Fe-PTFE respectively, the effective maximum load pressures are 31.2 kPa, 13.2 kPa, 21.8 kPa and 11 kPa respectively when the maximum deformation of the plates is 2 μm. These data are very useful as references for the design of a lapping machine.

关 键 词：超精密研磨 研磨盘 数值仿真 变形 

分 类 号：TG58[金属学及工艺—金属切削加工及机床] TG74