用QCM研究HMDS处理纳米ZnO的湿度测试对比  

Humid Test Comparision of Nano ZnO with HMDS on the QCM

作　　者：吕家云[1] 张健[2] 蒋全胜[1] 许磊[1] 

机构地区：[1]巢湖学院物理系,安徽巢湖238000 [2]华东师范大学电子科学技术系,上海200062

出　　处：《仪表技术与传感器》2009年第8期11-13,32,共4页Instrument Technique and Sensor

基　　金：上海市浦江人才计划项目(06PJ14037);传感器国家重点实验室开放项目(Skt0604)

摘　　要：基于QCM的气体传感器具有灵敏度高、结构简单等优点,是有潜力的气体传感器。但是,存在着选择性差的问题,而工作过程环境气体因素,如水蒸汽、有机挥发性气体(VOCs)等的影响,是必须解决的问题。首先,以石英晶体微天平传感器(QCM)为测试平台,研究以纳米ZnO作为敏感膜的湿度检测敏感特性。实验结果表明:纳米氧化锌作为敏感膜,在一定的湿度范围内有很高的灵敏度和重复性。其次,用六甲基二硅胺烷(Hexamethyl disilazane,HMDS)对纳米ZnO膜进行处理时发现,与未用HMDS处理的纳米ZnO膜相比较,该纳米ZnO对湿度的响应敏感度明显降低,特别是在高湿度时。进一步的研究发现,用HMDS处理后的纳米ZnO膜对有机气体,如乙醇仍有很好的响应。该种特性可以被用来开发对水蒸汽具有抗干扰能力的气体传感器。QCM-based gas sensors are potential for applications due to its simple structure and high sensitivity. But the low selectivity attributed to the environment factors such as the variations of humidity, volatile organic vapors （VOCs） need to be concerned. This paper divided into two sections, first, the sensing properties of nano zinc oxide were studied by quartz crystal microbalance （QCM） in relative humidity detection. The results showed that the nano zinc oxide film had high humidity sensitivity and good reproducibility. Second, the humidity sensing properties of nano zinc oxide treated by HMDS （ Hexamethyl disilazane） were also investigated. It is found that the humidity sensitivity of nano zinc oxide treated by HMDS was much lower than untreated ZnO, especially in high relative humidity environment. The further study indicated that the nano ZnO treated by HDMS was more sensitive to organic gases, such as ethanol, but less sensitive to humidity. It indicates that the HMDS treated nano ZnO can be used to detect organic gases in high relative humidity environment with improved selectivity.

关 键 词：石英晶体微天平 相对湿度 纳米氧化锌 乙醇 六甲基二硅胺烷 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]