电子级高纯超细结晶型硅微粉的制备  

Preparation of Electron Grade Superfine Quartz Powder with High-purity and Crystalline

作　　者：蒋述兴[1] 王秋红[1] 

机构地区：[1]桂林工学院有色金属及材料加工新技术教育部重点实验室

出　　处：《中国粉体技术》2009年第4期36-39,共4页China Powder Science and Technology

基　　金：广西自然科学基金项目,编号:桂科基0639061

摘　　要：用钇稳定氧化结球为研磨介质，用研磨筒内壁和搅拌器都衬以聚氨酯的搅拌磨制备了电子级高纯超细环氧塑封料用石英微粉，研究了石英微粉特征参数d30随搅拌粉磨时间延长的变化规律，考察了钇稳定氧化锆球对石英微粉的污染大小，分析和探讨了1μm以下超细石英微粉的化学成分和形貌特征。实验证明，用该搅拌磨磨细石英砂可获得1μm以下、SiO2的质量分数达到99．9％的高纯超细石英微粉，但难以获得球形石英微粉。Utilizing yttrial-stabilized zirconia balls as grinding medium, the agitator mill whose grinding tube interior and agitator lined with the polyester plastics was used to prepare electron grade superfine quartz powder with high-purity and crystalline by grinding quartz sand. The changing law of the special parameters of superfine quartz powder with the variations of grinding time of the agitator mill, contamination level of yttrial-stabilized zirconia balls on the superfine quartz powder, and the chemical composition and microcosmic shape of the superfine quartz particles which was smaller than 1μm were discussed. The results showed that the superfine quartz particles below 1μm and with SiO2 content of 99.91% could be obtained, but it was very difficult to achieve the spherical superfine quartz particles by grinding the quartz sand in agi- tator mill.

关 键 词：搅拌磨 石英微粉 环氧塑封料 

分 类 号：TB383[一般工业技术—材料科学与工程]