基于光纤信号传输的准分子激光器控制系统  

Development of controller for excimer laser based on optical fiber

作　　者：史萌萌[1] 江海河[1] 邓国庆[1] 贺龙海[1] 

机构地区：[1]中国科学院安徽光学精密机械研究所,合肥230031

出　　处：《激光技术》2009年第1期100-103,共4页Laser Technology

基　　金：国家自然科学基金资助课题(60478025);江苏省高技术研究计划资助项目(BG2007015)

摘　　要：为了解决准分子激光器在工作时产生的电磁干扰对激光器控制系统信号的影响,利用光纤的抗电磁干扰特性,采用光纤进行信号的传输,研制了用于信号传输的模拟和数字光纤传输模块和基于该模块的嵌入式准分子激光器控制系统。经测试,该系统模拟通道的-3dB带宽为直流到3MHz,非线性误差最大为1.2%,激光器在工作过程中,控制系统工作稳定、可靠。结果表明,该系统具有很好的抗电磁干扰能力。To solve the problem of that the electromagnetic interference（EMI） induced by a working exeimer laser, which might affect the signal of the laser control system, the analog and digital optical fiber models for signal transmission and embedded eximer laser control system were designed by transmitting the signals with optical fibers for their character of immunity to EMI. It was proved that the system＇s analog channel＇s -3dB bandwidth was DC -3MHz,its max nonlinearity was 1.2% ,and the control system was stable and reliable while the excimer laser working. Experiment results indicate that this system have good character of immunity to EMI.

关 键 词：激光器 电磁干扰 光纤 嵌入式系统 

分 类 号：TN248.22[电子电信—物理电子学]