丘形柔性神经微刺激电极阵列  

Dome-shaped flexible microelectrode arrays for neural stimulation

作　　者：孙晓娜[1,2] 李刚[1] 朱壮晖[1,2] 周洪波[1,2] 赵建龙[1] 任秋实[3] 

机构地区：[1]中国科学院上海微系统与信息技术研究所,上海200050 [2]中国科学院研究生院,北京100039 [3]上海交通大学激光与生物医学研究所,上海200030

出　　处：《光学精密工程》2009年第9期2176-2183,共8页Optics and Precision Engineering

基　　金：国家973重点基础研究发展规划资助项目(No.2005CB724305);上海市自然科学基金资助项目(No.07ZR14134);上海市优秀学科带头人资助项目(No.06XD14037);上海市科委纳米专项基金资助项目(No.0652nm016);中科院上海微系统与信息技术研究所青年创新基金资助项目(No.2008QNCX02)

摘　　要：为了实现电极位点与靶细胞的良好接触,改善刺激效果,同时保证刺激电极的自身安全,提出了一种具有圆滑外形的丘形柔性神经刺激微电极阵列。以光敏性聚酰亚胺(Durimide 7510)为基质材料,利用光刻和金属层图形化结合电镀工艺,制作了6×6丘形柔性神经刺激微电极阵列,每个电极位点底面直径为150μm,高度约为50μm。通过数值模拟、形貌观测和电学性能测试对制备的微电极进行了评价。实验结果表明:相对于传统的平面微电极阵列(具有相同底面积),三维丘形电极位点的阻抗(@1kHz)降低了约4倍,可实现更有效的刺激;而相对于塔形电极,丘形电极则具有更均匀的表面电流密度分布,保证了电极长期工作的安全性。In order to enhance the contact between electrode sites and target neurons, improve the stimulation efficiency and reduce the electrochemical erosion of electrodes, dome-shaped flexible neural microelectrode arrays （MEAs） for neural stimulation were proposed. By using photosensitive polyimide （Durimide 7510） as its substrate, a flexible microelectrode with a 6 × 6 array of dome-shaped electrode sites was fabricated by com- bining the photolithography and the metal-patterning with electroplating process, in which each electrode site has a diameter of 150μm and a height of 50μm. An evaluation of the dome-shaped electrode was also performed by simulation, SEM and electrical characters. Experimental results show that the electrode impedance of the 3D dome-shaped microelectrodes has decreased by 80 % as compared with those of conventional planar microelectrodes with the same base area. Moreover, the dome-shaped electrodes can produce more uniform current distribution than that of the 3D pyramid-shaped microelectrodes, which is helpful for its stimalation effect and long-term safety.

关 键 词：刺激电极 丘形柔性电极 微电极阵列 电流密度 

分 类 号：TP212.3[自动化与计算机技术—检测技术与自动化装置] R338[自动化与计算机技术—控制科学与工程]