沉积在液体基底上银薄膜的表面形貌及内应力释放机制  

Surface Morphology and Stress Relief Mechanism of Silver Films Deposited on Liquid Substrates

作　　者：张永炬[1,2] 余森江[3,2] 

机构地区：[1]台州学院物理系,临海317000 [2]浙江大学物理系,杭州310027 [3]中国计量学院物理系,杭州310018

出　　处：《真空科学与技术学报》2009年第5期570-575,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金(No.20571067,20601024)资助课题

摘　　要：利用直流磁控溅射方法在液体(硅油)基底表面成功制备出具有自由支撑边界条件的金属银薄膜系统,研究了该薄膜的形成机理、表面形貌演化规律及内应力释放机制。实验发现银薄膜的形成过程基本可分为准圆形团簇、分枝状结构凝聚体和连续薄膜等几个阶段。沉积后,当样品暴露在大气环境中,银薄膜自身产生强烈收缩效应并促使其表面形貌不断演化,一直持续到几十小时之后薄膜系统的自由能降到最低为止。由于金属薄膜与液体基底之间的切向相互作用能几乎为零,银薄膜在收缩过程中可形成宽大的裂纹和平行的直线状(或扭曲状)褶皱花样。基于薄膜的应力理论,本文对银薄膜的开裂和起皱行为进行了详细研究。The freely sustained silver films were deposited by DC magnetron sputtering on liquid substrates, such as a drop of silicone oil on glass. The influence of the film growth conditions, such as the deposition time, sputtering power and exposure to air, on microstructures and surface morphologies of the film was studied. The surface morphology was characterized with scanning electron microscopy （SEM）. Three distinctive stages of the Ag film growth were observed： spherical cluster formation, ramified aggregation and continuous Ag film growth. The broad cracks and sharp-edged wrin- Ides on Ag film surface indicated that air exposure results in strong contraction of the films and continuous changes of morphology till its free energy minimized 10 hours later, possibly because of the small interface stress of the Ag film and the liquid substrate. The cracking and wrinkling of mechanism of the Ag films were also tentatively discussed.

关 键 词：液体基底 银薄膜 内应力 裂纹 褶皱 

分 类 号：O484[理学—固体物理]