纳米楔形光纤探针的制备  

Fabrication of a Wedge-Shaped Fibre-Optical Nano-Probe

作　　者：杨修文[1] 祝生祥[2] 江锐[1] 石义杰[1] 

机构地区：[1]郧阳师范高等专科学校物理系,湖北丹江口442700 [2]同济大学Pohl固体物理研究所,上海200092

出　　处：《微纳电子技术》2009年第9期557-560,共4页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(69877014);湖北省教学研究资助项目(2003298)

摘　　要：基于挤压形变的原理,设计了一种用于制备楔形光纤探针的化学腐蚀简易装置。以普通的石英光纤为材料,通过改变自制夹具的松紧程度引起夹具在光纤上挤压力的变化,使光纤发生形变形成楔形,然后用适当比例的氢氟酸腐蚀液,制备出楔形的光纤探针。该法具有重复性高、探针形貌可控、操作方便、实验费用低廉、易于批量生产、受环境的影响较小、获得的探针表面光滑等优点。实验表明,外力越大,挤压形成的光纤楔角越小,楔形光纤顶端的脊越大,楔角为15°～40°,楔脊可达4μm。A simple dynamic chemical etching device based on the extrusion forming technique was developed to fabricate wedge-shaped optical fiber probes. The nanometer order wedgeshaped optical fiber probes were fabricated from ordinary single mode quartz optical fibers. The optical fibers were deformed by using the external force extrusion with the clamp made by ourselves, and followed by a chemical etching in hydrofluoric acid （HF） to wedge-sharpen the tips. This method has the advantages, such as reproducibility, controllability, convenience, lower cost, and can make the probes surface smooth. Moreover, it is not so sensitive to the experimental envirornnent. The experiment indicates that the higher the outside force, the less the wedge angle, the higher the length of the wedge-sharped tip, and the wedge angles are 15°- 40°, the length of the wedge-sharped tip is 4 μm.

关 键 词：光纤探针 楔形 化学腐蚀 挤压变形 压力 

分 类 号：TN253[电子电信—物理电子学] TN305.2