高质量灵敏度声波传感器(英文)  

Acoustic Wave Sensors with High Mass Sensitivity

作　　者：李红浪[1] 程利娜[1] 刘久玲[1] 王文[1] 何世堂[1] 

机构地区：[1]中国科学院声学研究所,北京100080

出　　处：《压电与声光》2009年第5期619-623,626,共6页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(10774159,10834010)~~

摘　　要：压电晶体声波器件具有灵敏度高,体积小,价格低等独特优点,因而在气体和液体检测领域的应用前景广。该文首先介绍了多种不同类型的声波传感器的结构和特性,重点给出了几种具有高质量灵敏度的声波传感器,并进行了相应实验验证。Acoustic devices on the basis of piezoelectric crystals are promising technology for gas and liquid sensing application due to their remarkable characteristics including high sensitivity, impact size and low price. This paper firstly reviews various acoustic wave sensors configuration and characteristics, then focuses on several high mass sensitivity ones. Corresponding theoretical analysis of acoustic wave sensors and experimental results are presented.

关 键 词：声波 传感器 质量灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN6[自动化与计算机技术—控制科学与工程]