磁头用软磁Fe-Co-Al-O薄膜的结构和性能  

Structure and Magnetic Properties of FeCoAlO Thin Film for Magnetic Head

作　　者：卢佳[1] 郑富[1] 王璇[1] 刘立旺[1] 张璐然[1] 魏福林[1] 

机构地区：[1]兰州大学磁学与磁性材料教育部重点实验室磁性材料研究所,甘肃兰州730000

出　　处：《磁性材料及器件》2009年第5期8-10,20,共4页Journal of Magnetic Materials and Devices

基　　金：国家自然科学基金资助项目(10874060)

摘　　要：用射频磁控溅射方法制备了记录磁头用FeCoAlO薄膜软磁材料,与FeCo合金薄膜相比,FeCoAlO薄膜的软磁性能有明显改善。(Fe72Co28)100-x(Al2O3)x薄膜的饱和磁感应强度Bs在x=3.1～5.9范围内基本保持恒定,当x>5.9时,饱和磁感应强度急剧降低;其矫顽力随Al2O3含量的增加迅速降低。当Al2O3含量为5.9时,薄膜的矫顽力由未加Al2O3时的3580A/m下降到Hce≈418A/m,Hch≈289A/m,饱和磁感应强度Bs=2.15T;薄膜还表现出良好的高频特性,当频率f≤1.0GHz时,磁导率μ≈500。结构分析表明,薄膜中软磁性能的改善和添加Al2O3导致的晶粒细化有关。Soft magnetic FeCoAlO thin film for recording magnetic head were prepared by rf magnetron sputtering, with highly improved soft magnetic properties compared to that of FeCo alloy thin film. For （Fe72CO28）100-x （Al2O3）x film with x=3.1-5.9, the saturation magnetic flux density Bs remains constant, then, decreases drastically when x〉5.9. The coercivity of FeCoAlO thin films decreases with increasing Al2O3 content. As x=5.9, the coercivity force of the thin film decreases to Hcc≈418A/m, Hch≈289A/m from 3580A/m of pure FeCo film （x=0）, and the saturation magnetic flux density Bs =2.1ST. The film shows good high frequency response, with permeability μ≈500 asf≤1.0 GHz. The good magnetic properties are correlated with refining of gain size in film resulting from the introduction of Al2O3.

关 键 词：FeCoAlO薄膜 纳米晶 软磁性能 

分 类 号：O484.43[理学—固体物理]