基于干涉条纹的激光准直技术的检测系统  

Laser alignment measuring and testing equipment based on interference fringe

作　　者：胡长德[1] 李咏强[1] 周欣[2] 诸葛晶昌[2] 齐浩[1] 

机构地区：[1]装备指挥技术学院士官系,北京102200 [2]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《激光技术》2009年第5期522-525,共4页Laser Technology

摘　　要：为了获得被测导轨的直线度误差信息,采用半导体激光器发出的激光,经准直扩束后照射到楔形平板上,利用楔形平板上下表面的反射作用,将这束激光分解为交角2α的交叉光束,在这两条平行激光束交叉的范围内产生干涉条纹。将此干涉光作为准直测量的基准,用线阵CCD作为光电转换器件固定在接收靶上;检测接收靶处于被测导轨任一测量点时干涉条纹在接收靶上的位置,得到了该测量点与准直光束的偏移量。进行了重复性实验以及与光电自准直仪的比对实验。在测量长度842mm时,直线度误差18.96μm,测量长度最远可达14m。结果表明,样机的性能、指标基本达到了预定目标。A laser alignment system based on interference fringe was developed to test the alignment of a rail. After being collimated and broadened, a semiconductor laser was irradiated onto a wedge. Reflecting on the front and back surfaces of the wedge, the laser beam was divided into two cross beams at an angle of 2α,leading to interference fringes in the crossing zone. The interference beam was used to be the measuring reference,and a linear CCD was fixed on the receiving target. The offset distance between the measured point and the measure reference was obtained by detecting the interference position on the receiving target. The stability and repetition of the measuring system was tested. The test results were compared with those obtained with a photoelectricity autocollimator. The alignment error was 18.96μm when the test length was 842mm. The maximum test length was up to 14m. The results indicate that the performance of the sample device met the scheduled target.

关 键 词：测量与计量 激光准直 干涉条纹 线阵CCD 比对实验 

分 类 号：TH741[机械工程—光学工程]