电火花摇动加工微细阵列轴和孔的试验研究  

Experimental Research of Machining Array Micro Electrode and Hole with EDM Orbital Machining

作　　者：郭永丰[1] 纵宁宁[1] 白基成[1] 任宇江[1] 侯朋举[1] 

机构地区：[1]哈尔滨工业大学机电工程学院,黑龙江哈尔滨150001

出　　处：《电加工与模具》2009年第5期1-4,共4页Electromachining & Mould

基　　金：国家高技术研究发展计划资助项目(2007AA04Z345);黑龙江省重大攻关项目(GA06A501)

摘　　要：针对微细阵列轴和孔的电火花加工,提出了利用数控电火花加工机床摇动功能的摇动加工微细阵列轴和孔的方法。此法是基于电火花反拷贝加工的原理,先用丝电极在薄平板(中间电极)上按要加工的阵列轴和孔间距或数倍间距加工阵列小孔(直径0.1 mm以上),然后用加工的薄平板(中间电极)作电极,电火花摇动加工微细阵列轴(电极),最后用此微细阵列电极加工阵列孔。进行了电火花摇动加工微细阵列电极试验,得到了单电极直径为50μm、长径比为16的3×3阵列电极,并用此电极在70μm厚的不锈钢板上加工出单孔直径为70μm的3×3微细阵列孔。试验结果表明,电火花摇动加工方法可实现微细阵列轴和孔的加工。Aiming at machining micro electrode and hole with EDM, machining micro electrode and hole with EDM orbital machining function of the CNC electrical discharge machine is introduced. This method is based on the reverse copying technology of EDM,on the CNC electrical discharge forming machine, firstly array small hole （diameter of more than 0.1 mm） is machined on the sheet （interim electrode） with desired hole pitch using wire electrode, then array micro shaft （electrode） is machined with the sheet as electrode, finally, the array micro hole is machined with the array micro electrode. An experiment of machining array micro electrode with EDM orbital machining is conducted and from the experiment 3 ×3 micro-electrode array is obtained with the diameter of a single electrode is about 50 μm and the aspect ratio holes is 16. With the array micro electrode obtained, 3× 3 microhole array is machined and the diameter of a single hole is about 70 μm. The result of the experiment shows that it is feasible of machining array micro electrode and hole with EDM orbital machining.

关 键 词：微细阵列电极 微细阵列孔 摇动加工 

分 类 号：TG661[金属学及工艺—金属切削加工及机床]