多弧离子镀制备TiN-Cu超硬纳米复合涂层的研究  

Research on TiN-Cu Super-hard Nano-composite Coating Prepared by Multi-arc Ion Plating

作　　者：郑国龙[1] 穆静静[2] 王从曾[1] 马捷[1] 

机构地区：[1]北京工业大学材料科学与工程学院,北京100024 [2]中国电力科学研究院,北京100192

出　　处：《热处理》2009年第5期20-23,共4页Heat Treatment

摘　　要：采用多弧离子镀技术制备了TiN-Cu超硬纳米复合涂层,并对涂层断口形貌、相组成、择优取向、硬度等进行了测试分析。试验结果表明,用多弧离子镀技术的分层沉积和混合沉积方式都可以制备出硬度高达40.8 GPa以上的TiN-Cu超硬复合纳米涂层。涂层中TiN晶粒尺寸普遍<15 nm,达到了纳米晶水平,且涂层中的Cu含量、TiN择优取向等因素均对涂层硬度有重要影响。TiN-Cu super-hard nano-composite coating was preferred by a multi-arc ion plating. Fracture morphology,phase structure, preferred orientation and microhardness were investigated for TiN-Cu coating. The experimental results show that TiN-Cu super-hard nano-composite coating can be prepared through the layer-by-layer depositing or the mixing depositing of multi-arc ion plating and its hardness will be as high as 40.8 GPa, and that TiN grain size in TiN-Cu coating will be generally less than 15 nm,achieving nano-sized level. Besides,the hardness of TiN- Cu coating will be seriously influenced by the copper content and the preferred orientation of TiN grain in coating.

关 键 词：多弧离子镀 超硬涂层 TiN-Cu复合涂层 纳米晶 

分 类 号：TG174.444[金属学及工艺—金属表面处理]