In/Pd-Doped SnO2-Based CO Micro-Structure Sensor with High Sensitivity and Quick Response  

作　　者：刘丽 张彤 李守春 王连元 范会涛 李伟 

机构地区：[1]State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012 [2]College of Physics, Jilin University, Changchun 130012

出　　处：《Chinese Physics Letters》2009年第10期68-71,共4页中国物理快报（英文版）

摘　　要：In/Pd-doped SnO2 is synthesized via a sol-gel method and coated on a silicon substrate with Pt electrodes to fabricate a micro-structure sensor. The sensor can be used to detect CO down to l ppm （the sensitivity is about 3）, and the response time and recovery time are about 5 and 15 s, respectively. Excellent selectivity is also found based on our sensor. These results demonstrate a promising approach to fabricate high-performance CO sensors with high sensitivity and quick response.In/Pd-doped SnO2 is synthesized via a sol-gel method and coated on a silicon substrate with Pt electrodes to fabricate a micro-structure sensor. The sensor can be used to detect CO down to l ppm （the sensitivity is about 3）, and the response time and recovery time are about 5 and 15 s, respectively. Excellent selectivity is also found based on our sensor. These results demonstrate a promising approach to fabricate high-performance CO sensors with high sensitivity and quick response.

关 键 词：Instrumentation and measurement Condensed matter: structural mechanical & thermal Chemical physics and physical chemistry 

分 类 号：TN304.21[电子电信—物理电子学] TM22[一般工业技术—材料科学与工程]