利用ZnO薄膜温变特性构建光纤温度传感器  

Optical Fiber Temperature Sensor Based on Temperature-dependent Optical Properties of ZnO Film on the Sapphire Fiber-ending

作　　者：隋成华[1] 郑东[1] 刘玉玲[1] 蔡萍根[1] 许晓军[1] 

机构地区：[1]浙江工业大学理学院应用物理系,杭州310023

出　　处：《光电工程》2009年第10期94-99,共6页Opto-Electronic Engineering

基　　金：国家自然科学基金资助项目(60777034)

摘　　要：采用电子束蒸发的方法在蓝宝石光纤端面上生长ZnO薄膜,不同测试温度下透射光谱表明:ZnO薄膜的光学吸收边随温度的升高呈明显的红移。根据ZnO薄膜的光学吸收边所呈现的这一负温度效应,研制了基于ZnO薄膜温变特性的透射式光纤温度传感器。实验表明,在室温至500℃测温范围内其灵敏度优于0.05nm/℃。该光纤温度传感器的测温范围理论上可从负温区(约-260℃)至高温区(约700℃)。与其他传统的温度传感器相比,该温度传感器具有结构简单,成本较低,测量稳定性高和量程范围宽等优点。ZnO thin film was grown on the sapphire fiber-ending by Electron-beam Evaporation （EBE）. The transmittance spectra show that the optical absorption edge red shifts obviously with increasing temperature. Based on negative temperature effect of the optical absorption edge of the ZnO thin film, transmissive optical fiber temperature senor was designed and fabricated. In the range from room temperature to 500℃, the sensitivity is beyond 0.05 nm/℃ with the experiment. The measuring temperature range of the sensor can be from -260℃ to 700℃ in theory. Compared with the traditional temperature sensor, the temperature sensor has the advantages of simpler structure, lower cost, better stability and broader measurement range.

关 键 词：ZNO薄膜 蓝宝石光纤 光学吸收边 光纤温度传感器 

分 类 号：TN247[电子电信—物理电子学]