一种新型三维敏感气体传感器的研究  

Study on novel gas sensor with 3D sensitive effect

作　　者：杨英[1] 陈向东[1] 邱秀荣[1] 

机构地区：[1]西南交通大学信息科学与技术学院,四川成都610031

出　　处：《传感器与微系统》2009年第10期39-41,45,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(60572026;60871024);教育部新世纪优秀人才支持计划资助项目(A0160419950120)

摘　　要：在平面微电极式结构的基础上,提出了一种新型薄膜气体传感器,其主要结构引用了离散阵列的概念,将传统的长方体型薄膜改进为由多条小长方体有间隔的并行排列的离散结构,使敏感薄膜具有了三维敏感效应。根据半导体气敏薄膜的扩散响应理论,对传感器的响应时间和灵敏度特性进行了理论分析,证明新型传感器具有响应时间更短、灵敏度更高的优点;并分析了薄膜厚度对传感器响应时间的影响。A novel film gas sensor is proposed based on the plane microelectrode structure, using the numerous small cuboids in turns instead of conventional planar film structure by citing the concept of discrete array. This development makes the film have the ability of 3D sensitive effect. According to the proliferation response theory of semiconductor film,a theoretical analysis is made on the sensitivity and response time of the sensor, which proves that the new sensor has an advantage over the conventional one on the response time and sensitivity. And effect of thickness of gas sensing thin film on gas response time is analyzed.

关 键 词：气体传感器 三维敏感薄膜 响应时间 灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]