TiN-TiN/CrN-CrN薄膜的制备及应用研究  

Fabrication Process and Application of TiN-TiN/CrN-CrN Films

作　　者：王辉[1] 梁红樱[1] 张欣苑[1] 赵海波[1] 文季秋[1] 

机构地区：[1]四川大学

出　　处：《工具技术》2009年第10期14-18,共5页Tool Engineering

基　　金：国家科技支撑计划(2008BAF32B06)

摘　　要：通过采用辅助增强磁控溅射方法,研究了在硬质合金刀片上制备TiN-TiN/CrN-CrN薄膜的工艺方法。利用SEM、XRD等方法分析了Cr靶溅射电流、N2气量的变化对TiN-TiN/CrN-CrN膜的表面形貌及结构和织构影响,采用断续切削试验方法研究了TiN-TiN/CrN-CrN涂层刀片的耐磨性及抗剥落性,得出了一种TiN-TiN/CrN-CrN薄膜工业化制备方法。In the present paper, we studied the process for fabrication of TiN- TiN/CrN - CrN films on hard alloyed blade through an enhanced magnetic sputtering method. We studied effects of the sputtering current of Cr target and the variation of N2 flow on the surface morphologies, structure and texture by scanning electron microscope （SEM） and powder X-my diffraction （XRD）. We also studied the abrasion performance and anti-stripping of TiN - TiN/CrN - CrN films with intermittent cutting method, then we found an industrial fabrication method for TiN- TiN/CrN- CrN films.

关 键 词：辅助增强磁控溅射 CRN薄膜 制备 方法 

分 类 号：TG706[金属学及工艺—刀具与模具]