高精度标准单晶硅球直径测量系统的研究  

Study on High-Precision Diameter Measuring System for a Single-Crystal Silicon Sphere

作　　者：康岩辉[1] 邾继贵[1] 罗志勇[2] 叶声华[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072 [2]中国计量科学研究院,北京100013

出　　处：《传感技术学报》2009年第10期1392-1395,共4页Chinese Journal of Sensors and Actuators

基　　金：国家科技支撑计划资助课题(2006BAF06B06)

摘　　要：为建立我国高准确度固体密度基准和质量自然基准,对高精度标准单晶硅球直径测量系统进行了研究。论述了平面波前激光干涉法测量直径的原理和方法,分析了相移扫描、温度测量控制、以及硅球体积计算等系统的关键组成部分,并给出了各部分的实验结果。理论分析和实验结果表明,整个直径测量系统目前的不确定度为3 nm。In order to establish high-accuracy solid density standard and mass natural standard in China, the high-precision diameter measuring system for a single-crystal silicon sphere is studied. The principle and method for measuring diameter by using plane-wave interferometry are discussed. The important aspects of the whole system are analyzed, including phase shift by pressure scanning method, temperature measurement and control, and volume calculation of the silicon sphere. Each result of the above is presented. Theoretical analysis and experimental results show that the standard uncertainty of diameter measurement of the silicon sphere is about 3 nm.

关 键 词：光学测量 直径测量 硅球 相移扫描 

分 类 号：TB921[一般工业技术—计量学]