电控可变焦128元×128元自适应液晶微透镜阵列  

Electrically driving and controlling adaptive 128 element×128 element liquid crystal micro-lens array with tunable focal length

作　　者：李晖[1] 张新宇[1] 张天序[1] 沈绪榜[1] 

机构地区：[1]华中科技大学图像识别与人工智能研究所多谱信息处理技术国防科技重点实验室,湖北武汉430074

出　　处：《光学精密工程》2009年第10期2351-2358,共8页Optics and Precision Engineering

基　　金：国家自然科学基金重点资助项目(No.60736010);国家自然科学基金资助项目(No.60777003)

摘　　要：基于已有的单圆孔电极液晶透镜的结构与设计方法,研制了新型的电控可变焦128元×128元液晶微透镜阵列。该面阵液晶微透镜使用氧化铟锡(ITO)玻璃作为上下基板,上电极通过光刻技术和盐酸腐蚀方法得到128元×128元圆孔阵列图案;下电极为ITO膜。上电极的圆孔阵列排列整齐,每个圆孔的直径为50μm,圆孔之间的间隔为100μm,夹在上下基板之间的液晶层的厚度为20μm。验证了该面阵液晶微透镜的光学特性,结果表明,在0.2~5.0 V(RMS),该面阵液晶微透镜的焦距为50~400μm,焦点的焦斑尺寸在10μm左右,点扩展函数值近似于理论数值。该面阵液晶微透镜的工作电压与焦距成反比,可以成清晰的多重像。A new electrically driving and controlling 128 element× 128 element Liquid Crystal （LC） micro-lens array with tunable focal length is proposed based on the structure and design methods of a single circular hole electrode LC lens. The Indium Tin Oxide （ITO） glasses are used as the top and bottom substrates of the LC micro-lens array. The top electrode patterns containing 128 element× 128 element are obtained by a lithography and a hydrochloric acid etching,in which every element is a sin- gle circular hole of 50 μm diameter and the distance between the two circular holes is 100 t^m. The bottom electrode is just the ITO film. Furthermore, the thickness of LClayer between the top and the bottom electrodes is about 20 t^m and the focal length of the LC micro-lens array can be electrically tuned from 50μm to 400μm under the operating voltage from 0.2 V （RMS） to 5.0 V（RMS）. The re- sult of the test indicates that the point spread function of the LC micro-lens array is close to the theory value,and the relationship of operating voltage and focal length is in an inverse proportion. These re- suits show that the imaging characteristic of the LC micro lens array can be comparable to those of the conventional optical micro-lens arrays.

关 键 词：自适应光学 液晶 大面阵微透镜 

分 类 号：TH703[机械工程—仪器科学与技术] O753.2[机械工程—精密仪器及机械]