多通道柔性神经微电极加工工艺  

Microfabrication of multichannel flexible neural microelectrodes

作　　者：邢玉梅[1,2] 惠春[1] 徐爱兰[3] 李刚[4] 赵建龙[4] 任秋实[1] 

机构地区：[1]上海交通大学生命科学技术学院,上海200240 [2]上海大学理学院纳微能源研究所,上海200444 [3]上海交通大学微纳科学技术研究院,上海200240 [4]中国科学院上海微系统与信息技术研究所,上海200050

出　　处：《光学精密工程》2009年第10期2465-2472,共8页Optics and Precision Engineering

基　　金：国家973重点基础研究发展规划资助项目(No.2005CB724305;2005CB724302);中国博士后科学基金资助项目(No.20070410724);上海市科委国际合作专项资助项目(No.8160706000);上海市科委纳米专项资助项目(No.0852nm017000)

摘　　要：针对多通道柔性神经微电极的设计及制作,研究了微电极的加工工艺。采用一种新型的柔性聚合物材料——聚对二甲苯(parylene C)作为微电极的基底和绝缘材料,借助微细加工技术,制作了36通道(按6×6矩阵排列)的柔性神经微电极,微电极的尺寸分别为Φ150μm(圆形)和150μm×150μm(方形),电极引线线宽为30μm。无论微电极为圆形或方形,表面均平整光滑、轮廓清晰。电学性能测试结果表明,1 kHz时微电极的阻抗仅为7 kΩ左右,且随着频率的增加,阻抗逐渐降低,呈明显高通特性。微电极加工质量较好,电学性能优良,实现了微电极和柔性基底的集成,有利于高效率批量制作,为视觉假体中柔性神经接口的研制奠定了基础。Multichannel flexible neural microelectrodes were designed and fabricated,and their fabrica- tion processes were also studied. A microfabrication technology was introduced to manufacture flexi- ble microelectrodes based on a new flexible substrate material, parylene C, due to its excellent electri- cal insulating, mechanical and biocompatible properties, and a 36-channel flexible neural microelec- trode was fabricated with the arrangement in a 6 × 6 square grid pattern. The size of microelectrode was φ150μm （circular） and 150μm×150μm（squre）, respectively,and the line width of metal trace was 30μm. It was found that the microelectrode shows a smooth surface and a distinct outline. A elec- trtical test indicates that the impedance of microelectrode is only 7 kΩ or so, and it reduceds as fre- quency increasing, which is an excellent high-pass behavior. Moreover, the mieroelectrode and a flexi- ble substrate can be integrated by the microfabrication technology. The mieroelectrode is suitable for the application in retinal prostheses, for it has a good quality and excellent electrical properties.

关 键 词：神经微电极 柔性基底 聚对二甲苯 微细加工 

分 类 号：TP212.3[自动化与计算机技术—检测技术与自动化装置] R338[自动化与计算机技术—控制科学与工程]