复合钒钛酸干凝胶薄膜的湿敏特性研究  

Humidity sensitive properties of poly-vanadium-titanium acid xerogel thin films

作　　者：李莉[1] 盖翠萍[1] 杨雪凤[1] 邵丽英[1] 王宝辉[1] 

机构地区：[1]大庆石油学院化学化工学院,黑龙江大庆163318

出　　处：《电子元件与材料》2009年第11期20-22,共3页Electronic Components And Materials

基　　金：黑龙江省教育厅科学技术研究资助项目(No.11531009)

摘　　要：采用sol-gel法制备了复合钒钛酸干凝胶(H2V10Ti2O30-y·nH2O)薄膜,并对其湿敏特性进行了研究。结果表明:该薄膜为层状结构。用此薄膜制备的湿敏元件,在RH为11%～95%的范围内,感湿特性曲线线性好,其响应、恢复时间分别为5s和20s,湿滞为RH2%,感湿温度系数为RH0.45%/℃,并具有良好的稳定性。H2V10Ti2O30-y·nH2O干凝胶薄膜湿敏元件的灵敏度和湿滞均优于复合钒酸(H2V12O31-y·nH2O)干凝胶薄膜湿敏元件。Poly-vanadium-titanium acid xerogel （H2V10Ti2O30-y·nH2O） thin films were fabricated by sol-gel method and their humidity sensitive properties were studied. The results show that the thin films have a layered structure. The humidity sensitive property curve of the humidity sensor prepared by this thin films is good linearity in the range of RH 11%-95%. Its response time and recovery time of the humidity sensor are 5 s and 20 s, respectively. The humidity hysteresis is RH 2% and the temperature coefficient of the humidity is RH 0.45%/℃ for the humidity sensor. The humidity sensor appear good long term stability. The sensitivity and humidity hysteresis of the humidity sensor are superior than those of poly-vanadium acid xerogel thin film humidity sensors.

关 键 词：SOL-GEL法 复合钒钛酸干凝胶 薄膜 湿敏特性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TB34[自动化与计算机技术—控制科学与工程]