烧结温度对SrTiO_3厚膜氧敏元件的影响研究  

Research on the Influence of Sintering Temperature on the Thick Film SrTiO_3 Oxygen Sensor

作　　者：郭明光[1] 曹全喜[1] 田森[1] 周媛[1] 

机构地区：[1]西安电子科技大学技术物理学院,陕西西安710071

出　　处：《电子科技》2009年第11期85-87,共3页Electronic Science and Technology

基　　金：陕西省自然科学基金资助项目(2002F10)

摘　　要：以固相合成法,在1200℃,1250℃,1275℃这3个烧结温度下,制备了SrTiO3厚膜氧敏元件。通过在600～850℃温度范围内分别测试样品,在大气气氛及N2气氛下的电阻,比较分析了不同烧结温度下样品的灵敏度及阻温特性,表明最佳烧结温度应在1250℃,且较高烧结温度有利于样品电阻的降低和阻温特性的改善。XRD分析和SEM分析表明,不同烧结温度均制备了物相纯净且表面结构疏松的样品。Donor-doped SrTiO3 thick film oxygen sensors are processed using solid phase synthesis at three sintering temperatures（1 200 ℃,1 250 ℃,and 1 275 ℃） respectively.Tests on the resistance of the samples in air and N2 at the temperature ranging from 600 ℃ to 850 ℃,and the following comparison of sensitivity and resistance-temperature characteristic indicate that the best sintering temperature is 1 250 ℃,and that a higher temperature is beneficial to the decrease in resistance and the improvement in resistance-temperature characteristic. XRD and SEM analysis shows that at different sintering temperatures, the samples are all pure in phase and loose in surface.

关 键 词：钛酸锶 氧传感器 烧结温度 

分 类 号：TN304.92[电子电信—物理电子学]