一种高精度激光光路自动准直系统的实现  

Implement of a High Precision Laser Beam Automatic Collimation System

作　　者：王自鑫[1] 李亨[1] 李佳明[1] 蔡志岗[1] 赖天树[1] 

机构地区：[1]中山大学光电材料与技术国家重点实验室,广东广州510275

出　　处：《应用激光》2009年第5期423-426,430,共5页Applied Laser

基　　金：国家自然科学基金资助项目(项目编号:60490295;60678009;10874247)

摘　　要：对高精度激光光路自动准直系统,提出了一种更加精准的四象限探测器的信号处理算法,采用四象限硅光电二极管代替传统的CCD探测光线指向,运用DSP技术处理探测信号,控制惯性压电陶瓷电动调节架快速自动准直,精度可达1μrad。该系统很好地解决了传统的CCD探测光线方法中的处理速度慢、校正精度低、占用资源大的问题。飞秒激光实验应用证明,系统能够实现激光光路的快速自动准直。A high precision laser beam automatic collimation system and a more precise signal processing method of four-quadrant photoelectric detector was proposed. The system uses four quadrant Silicon Photodiode instead of CCD to detect Laser beam direction, DSP to process the signal and control two inertial piezoelectric driving mirrors to correct the laser beam automatically with the control precision 1μrad. This system is superior to traditional CCD method in its high processing speed, good controlling precision and less hardware and software resource occupancy. The application in femto second（fs） laser experiment proved this system can realize automatic collimation fast and precisely.

关 键 词：四象限光电二极管 惯性压电陶瓷 激光准直 

分 类 号：TN242[电子电信—物理电子学] TP273.2[自动化与计算机技术—检测技术与自动化装置]