基于空气轴承的高精度圆度测量系统设计  

Design of the High-precision Circularity Measure System Based on Air Bearings

作　　者：赵午云[1] 陶继忠[1] 彭万欢[1] 

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621900

出　　处：《机械工程师》2009年第11期54-55,共2页Mechanical Engineer

摘　　要：利用高精度空气静压轴承和非接触位移传感器,设计了一套圆度测量系统,可以实现外圆柱面圆度的精密测量。该系统的圆度测量结果与英国Taylor Hobson公司的高精度圆度仪测量结果对比表明,可以达到0.1μm以下的测量精度。多次测量证明,该系统测量结果重复性好、可信性高。The paper used high-precision air bearings and non-contact displacement sensor to design a system for measure circularity. The system （：an measure exact columnar surface.After comparing measurement result with the alike kind equipment of U.K. Taylor Hohson company, the result is appropinquity. The high-precision circularity measure system can attain 0.1μm measurement accuracy, the results have good repeatability and high creditability.

关 键 词：空气轴承 圆度 测量 设计 

分 类 号：TG834[金属学及工艺—公差测量技术]