同时旋转起偏器和检偏器的红外椭圆偏振光谱仪研制  

DEVELOPMENT OF INFRARED SPECTROSCOPIC ELLIPSOMETER BY SYNCHRONOUS ROTATION OF THE POLARIZER AND ANALYZER

作　　者：黄志明[1] 金世荣[1] 陈诗伟[1] 陈敏辉[1] 史国良[1] 陈良尧[1] 褚君浩[1] 

机构地区：[1]中国科学院上海技术物理研究所红外物理国家重点实验室

出　　处：《红外与毫米波学报》1998年第5期321-326,共6页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金;上海市应用物理研究中心资助

摘　　要：研制成测量材料光学特性的红外椭圆偏振光谱仪，其测量波长范围为２．５～１２．５μｍ，入射角度在２０°～９０°连续可变．系统数据采集、前放自动增益控制、入射角度和波长设置及扫描均由计算机自动控制．给出了金反射率和ＧａＡｓ体材料折射率椭偏测量，并与其它方法进行了对比。A type of infrared spectroscopic ellipsometer was designed and constructed to study the optical properties of materials in the 2.5￣12.5μm wavelength range. The incident angle was continuously variable between 20° and 90°.The system operations, including data acquisition and reduction, preamplifier gain control, incident angle, wavelength setting and scanning were fully and automatically controlled by a computer. The reflectivity of Au and refractive index of GaAs bulk material, measured by the infrared ellipsometer, were given as an example, and a comparison of the results with other methods was also given. The experimental skill and main system errors were discussed.

关 键 词：红外 椭圆偏振 光谱仪 椭偏参数 光学常数 

分 类 号：TH744.123[机械工程—光学工程] TN216[机械工程—仪器科学与技术]