亚微米结构高Tc超导探测器研制  

DEVELOPMENT OF HIGH T c SUPERCONDUCTING IR DETECTORS WITH SUB MICROMETER STRUCTURE

作　　者：刘心田[1] 陆惠秀[1] 刘兴海[1] 李标[1] 褚君浩[1] 胡一贯[2] 洪义麟[2] 傅绍军[2] 

机构地区：[1]中国科学院上海技术物理所红外物理国家实验室 [2]中国科学技术大学国家同步辐射实验室

出　　处：《红外与毫米波学报》1998年第5期381-385,共5页Journal of Infrared and Millimeter Waves

摘　　要：应用同步辐射技术对ＹＢＣＯ超导薄膜进行光刻，获得０．８μｍ间隔的折线结构，研制成亚微米结构高Ｔｃ超导薄膜红外探测器，敏感元接收红外辐射能量提高约４２％．器件的最好探测率Ｄ＊达到１．８×１０１０ｃｍＨ１／２ＺＷ－１，工作温度约９０Ｋ．A sub micrometer (0.8μm) meander structure of the high T c superconducting film YBCO infrared detector was fabricated using the synchronous radiation technology. The receivable energy of IR radiation by the sensitive elements was enhanced by about 42%.The detectivity D * for the best detector was 1.8×10 10 cm·H 1/2 Z W 1 at the operational temperature of ￣90K.

关 键 词：红外探测器 超导器件 YBCO 高TC 亚微米 

分 类 号：O511[理学—低温物理]