一种可用于单色光谱检测的CMOS层叠传感器  

A CMOS Vertically Integrated Device for Monochromatic Spectrum Detection

作　　者：陈远[1] 徐之海[1] 冯华君[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,浙江杭州310027

出　　处：《光谱学与光谱分析》2009年第11期3015-3018,共4页Spectroscopy and Spectral Analysis

基　　金：国家自然科学基金项目(60577047);国家重点基础研究发展计划"九七三"项目(2009CB724)资助

摘　　要：一种可以对单色光谱进行检测的并基于标准CMOS工艺的新型器件结构进行了制作和测试。它的基本原理是:利用器件本身两层结构对偏蓝色的短波长光和偏红色的长波长光的不同响应特性,得到器件响应值对于波长的单调递增曲线并可由此得到输入光谱的单色波长信息。文章中介绍了器件的基本工作原理,设计制作了实验性器件并对其特性曲线进行了实际的标定,最终给出了可用于单色光谱测量的器件响应和波长的对应曲线。A vertically integrated sensor based on standard CMOS process,which can detect the wavelength of the monochromatic spectrum,was designed,manufactured and tested. It took the advantage of the two-layer structure of the device which can sense short wavelength and long wavelength illumination （among near UV,visible and near IR） simultaneously,then through these two different responses,the final device response showed monotonically increasing with the wavelength,and the wavelength can be known through this monotonicity. First we introduced the basic principle of the device,then the ideas in test device design were given. Finally,the authors measured the manufactured device,and the QEs of the device and the monotonic relationship between the device and the wavelength of the monochromatic spectrum were given.

关 键 词：单色光谱 光谱检测 CMOS传感器 垂直层叠结构 

分 类 号：TN36[电子电信—物理电子学]