光热膨胀材料的光谱特性分析及微型光热驱动机构研究  

Development of Photothermal Microactuator Based on Spectral Analysis of Photothermal Expansion Material

作　　者：刘超[1] 张冬仙[1] 章海军[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,浙江杭州310027

出　　处：《光谱学与光谱分析》2009年第11期3047-3051,共5页Spectroscopy and Spectral Analysis

基　　金：国家"863"计划项目(2006AA04Z237);国家自然科学基金项目(50775205)资助

摘　　要：光热膨胀材料的光谱特性是影响微型光热驱动机构性能的关键因素,该文在理论分析的基础上,采用单积分球测量法对四种聚合物材料的反射光谱及吸收特性进行了实验测量,据此选择制作光热驱动机构的最佳光热膨胀材料,发现掺杂染料的高密度聚乙烯(HDPE)材料在600～690nm的范围内有较强烈的吸收。选取HDPE作为光热膨胀材料,设计制作了一种长度1500μm的微型光热驱动机构,并采用自行研制的CCD显微监控和视频运动测量系统进行了驱动机构的驱动性能测量实验。研究结果表明,在10mW/650nm的半导体激光器驱动下,该微型光热驱动机构可以产生18.7μm的光热偏转量,说明其具有良好的光谱吸收和光热转换特性,可望在微光机电系统(MOEMS)中获得广泛应用。The spectral characteristic of materials is the key factor of the photothermal microactuator＇s performance. The present article introduces the operating principle,and analyzes the relationship between the material spectral characteristic and its expansion. As the photothermal microactuator is an innovative microactuator based on photothermal expansion that absorbs the laser energy and converts it into internal energy to realize the microdrive,the optimal photothermal expansion material with proper absorption spectrum characteristic matching the spectrum of light driving source needs to be found. The reflection and absorption spectra of four types of polymeric material,including PVC,HDPE,LDPE and PET,were obtained by using the single integrating sphere method. The results indicate that the reflection spectrum of the dyed high-density polyethylene （HDPE） is of double-peak structure in visible band,and there is strong absorption within the range of 600-690 nm,which means it would match the light driving source quite well in the broad spectral range. Therefore,HDPE was chosen as the photothermal expansion material. In order to check out the feasibility and performance of the photothermal microactuactor based on HDPE,a prototyping microactuator 1 500 mm in length and 30 mm in thickness was manufactured by using an excimer laser micromachining system. With a laser diode （10 mW/650 nm） as the external power source to activate the microactuator,performance measurement experiments were carried out by using a self-produced video movement measurement system with a CCD-coupled microscope. The experiment results demonstrate that the deflection of the microactuator reaches 18.7 mm at 10 mW of laser power,showing that the characteristics of spectral absorption and light-heat transition are quite well at 650 nm. This novel photothermal microactuator has simple structure,adjustable displacement output,and more mobility,and can be controlled remotely,so it will be quite useful for applications in the fields of micro-opti

关 键 词：光热膨胀 微驱动机构 反射光谱 吸收特性 

分 类 号：O433.1[机械工程—光学工程]