Fe_x(In_2O_3)_(1-x)磁性颗粒膜的微结构与磁性  

MICROSTRUCTURE AND MAGNETIC PROPERLY OF Fe_x(In_2O_3)_(1-x) MAGNETIC GRANULAR FILMS

作　　者：张连生[1] 张林[1] 张汝贞[1] 刘宜华[1] 张维咸 黄宝歆 

机构地区：[1]山东大学物理系,济南250100

出　　处：《金属学报》1998年第10期1095-1098,共4页Acta Metallurgica Sinica

基　　金：国家自然科学基金!59571016

摘　　要：用射频溅射法制备了金属／半导体Fex（In2O_3）(1-x)颗粒膜．用XRD，TEM辅以磁性测量研究了该系列颗粒膜的微结构实验结果表明，纳米尺度的Fe颗粒均匀地分散在非晶态In2O3中．退火可使In2O3晶化，其晶格常数与Fe的体积分数有关；退火可使Fe颗粒长大，由超顺磁性变为铁磁性．Metal/semiconductor Fex (In2O3)1-x granular films were prepared by the rfsputtering. The microstructure was studied by using XRD, TEM and magnetic measurements.The results showed that the nanometer-sized Fe particles uniformly dispersed in the amorphousIn2O3. Appropriate annealing leads to the crystallization of In2O3 films and the growth of theFe particle size. As a result, the magnetic behavior of the films transits from superparamagneticto ferromagnetic. The variation of the lattice constant for In2O3 depends on the volume fractionof Fe particles.

关 键 词：金属颗粒膜 微结构 半导体 超顺磁性 

分 类 号：TM274[一般工业技术—材料科学与工程]