狭缝型微空心阴极维持放电等离子体  

Plasma in Slit-Shaped Microhollow Cathode Sustained Discharge

作　　者：王跃东[1] 欧阳吉庭[1] 

机构地区：[1]北京理工大学理学院,北京100081

出　　处：《北京理工大学学报》2009年第11期1014-1017,共4页Transactions of Beijing Institute of Technology

基　　金：国家"八六三"计划项目(2007AA01Z276)

摘　　要：为在高气压条件下获得稳定、大体积的放电等离子体,实验研究了氩气中的狭缝型微空心阴极放电(SMHCD)特性.设计了包括SMHCD的三电极放电系统,并利用SMHCD作为预电离源(等离子体阴极),在不同放电条件下测试了该系统的放电特性并讨论了其放电模式.结果表明,SMHCD具有微空心阴极放电的特性,在适当条件下可以形成稳定的辉光放电.利用SMHCD离子源可以获得大体积、高气压的狭缝型微空心阴极维持放电(SMSD)等离子体.SMSD具有普通直流辉光放电的特性,且SMHCD本身的放电电流以及第三电极处所加的电压对SMSD的形成有十分重要的作用.该系统可以产生大面积均匀等离子体.In order to obtain stable, large-volume plasmas at high pressures, the characteristics of slit-shaped microhollow cathode discharge （SMHCD） in argon is investigated experimentally. A three-electrode system based on SMHCD is given. The SMHCD acts as the pre-ionization source or plasma cathode. The discharge characteristics of this system are investigated under different conditions. The discharge modes during the process of discharge are also discussed. The results showed that the SMHCD have similar characteristics as the traditional microhollow cathode discharges. The stable glow discharge can be obtained under certain conditions. SMHCD sustained discharge （SMSD） supplies a possible way to generate large-volume, high-pressure plasmas. The SMSD have similar characteristics as the traditional DC glow. The current of the SMHCD and the voltage applied on the third electrode play an important role in the generation of plasma in the outer space of the SMHCD. The system can generate large volume, uniform plasmas.

关 键 词：狭缝型微空心阴极 辉光放电 三电极系统 等离子体 

分 类 号：O461[理学—电子物理学]