用于单片集成真空传感器的SAR型ADC设计  

Successive approximation register ADC for monolithic vacuum sensor

作　　者：李金凤[1,2] 唐祯安[1] 汪家奇[1] 

机构地区：[1]大连理工大学电子与信息工程学院,辽宁大连116024 [2]沈阳化工学院信息工程学院,辽宁沈阳110142

出　　处：《大连理工大学学报》2009年第6期958-963,共6页Journal of Dalian University of Technology

基　　金：国家自然科学基金资助项目(90607003)

摘　　要：设计了一款适用于单芯片集成真空传感器的10位SAR型A/D转换器.轨至轨比较器通过并联两个互补的子比较器实现.信号采样时,比较器进行失调消除,提高电路的转换精度.电路采用0.5μm2P3M标准CMOS工艺制作.系统时钟频率为20MHz,输入电压范围为0～3V.在1.25MS/s采样率和4.6kHz信号输入频率下,电路的信噪比为56.4dB,无杂散动态范围为69.2dB.芯片面积为2mm2.3V电源电压供电时,功耗为3.1mW.其性能已达到高线性度和低功耗的设计要求.A 10-bit successive approximation register analog-to-digital converter （ADC） is presented for monolithic vacuum sensor. Rail to rail comparator is achieved by paralleling two complementary comparators. Offset cancellation circuit is included to improve the precision of the ADC. The circuit is fabricated in a 0.5μm 2P3M standard CMOS process. The system clock frequency is 20 MHz and the input voltage changes from 0 to 3 V. The effective chip area is 2 mm^2. The signal to noise and distortion ratio of 56.4 dB and the spurious-free dynamic range of 69.2 dB are achieved with 4.6 kHz sinusoid wave and 1.25 MS/s sample rate. The The proposed ADC meets the requirements of hi po gh wer dissipation is 3.1 mW at 3 V supply voltage. linearity and low power dissipation.

关 键 词：逐次逼近 A/D转换器 低功耗 CMOS 单片集成真空传感器 

分 类 号：TN432[电子电信—微电子学与固体电子学] TP212[自动化与计算机技术—检测技术与自动化装置]