Preparation,crystallization,and wetting of ZnO-Al_2O_3-B_2O_3-SiO_2 glass-ceramics for sealing to Kovar  

作　　者：Mao Wu Xin-bo He Zhuo-shen Shen Xuan-hui Qu 

机构地区：[1]School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China

出　　处：《International Journal of Minerals,Metallurgy and Materials》2009年第5期586-591,共6页矿物冶金与材料学报（英文版）

基　　金：supported by the National Natural Science Foundation of China (No.50274014, 50774005);the Major State Basic Research Development Program of China (No.2006CB605207);the National High-Tech Research and Development Program of China (No.2006AA03Z557)

摘　　要：A novel type of ZnO-Al2O3-B2O3-SiO2 glass-ceramics sealing to Kovar in electronic packaging was developed, whose thermal expansion coefficient and electrical resistance are 5.2× 10^-6/℃ and over 1×10^13 Ω·cm, respectively. The major crystalline phases in the glass-ceramic seals were ZnAl2O4, ZnB2O4, and NaSiAl2O4. The dielectric resistance of the glass-ceramic could be remarkably enhanced through the control of alkali metal ions into crystal lattices. It was found that crystallization happened first on the surface of the sample, leaving the amorphous phase in the inner, which made the glass suitable for sealing. The glass-ceramic showed better wetting on the Kovar surface, and sealing atmosphere and temperature had great effect on the wetting angle. Strong interracial bonding was obtained, which was mainly attributed to the interracial reaction between SiO2 and FeO or Fe3O4.A novel type of ZnO-Al2O3-B2O3-SiO2 glass-ceramics sealing to Kovar in electronic packaging was developed, whose thermal expansion coefficient and electrical resistance are 5.2× 10^-6/℃ and over 1×10^13 Ω·cm, respectively. The major crystalline phases in the glass-ceramic seals were ZnAl2O4, ZnB2O4, and NaSiAl2O4. The dielectric resistance of the glass-ceramic could be remarkably enhanced through the control of alkali metal ions into crystal lattices. It was found that crystallization happened first on the surface of the sample, leaving the amorphous phase in the inner, which made the glass suitable for sealing. The glass-ceramic showed better wetting on the Kovar surface, and sealing atmosphere and temperature had great effect on the wetting angle. Strong interracial bonding was obtained, which was mainly attributed to the interracial reaction between SiO2 and FeO or Fe3O4.

关 键 词：electronic packaging materials GLASS-CERAMIC CRYSTALLIZATION WETTING SEALING 

分 类 号：TQ174.758[化学工程—陶瓷工业] TJ410.89[化学工程—硅酸盐工业]